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Ulvac VPC-260F User Manual

Compact vacuum coater
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No.32100-2-02-6
User's Manual
Compact Vacuum Coater
VPC-260F
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.
ULVAC KIKO, Inc.

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Summary of Contents for Ulvac VPC-260F

  • Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. ULVAC KIKO, Inc.

  • Page 2: Table Of Contents

    Table of Contents Items with shade include description on safety. To Safely Use This Equipment (1) Before Using ................1 1. Target Users ................1 2. Read the Manual Thoroughly ..........1 3. Keep This Manual in a Safe Place ......... 1 4.
  • Page 3 4. Film Formation Steps ............14 4-1 Preparation ..............14 4-2 Film formation ............... 14 5. Measures upon Abnormal Conditions ........14 5-1 Instantaneous power outage ......... 14 5-2 Long power outage ............14 5-3 Operation after power recovery ........14 (5) Maintenance and Repair ............

  • Page 4: To Safely Use This Equipment

    No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc. Read this section before using the VPC-260F. Follow the instructions below to safely use the device and prevent personal injuries from occurring.
  • Page 5 Warning Label The warning labels are pasted on the following parts. 1) Glass bell jar (PL001) (PL005) 2) Left back of the rack (PL004) 3) Main valve handle (PL008) 4) Around the oil diffusion pump (D. P) (PL007) 5) Liquid nitrogen trap (PL006) When accompanied by a bell jar cover.
  • Page 6 Environment This product does not have explosion-proof design, and thus use in environments where inflammable substances are present should be avoided. Avoid this Otherwise, explosion could occur, causing fire and burns. action Temperature at a lower part of the oil diffusion pump is extremely high during operation.
  • Page 7 Operations Do not apply any shock to the glass bell jar, and avoid heating it to 50°C or higher. In a case of explosion upon vacuum condition, the exploded pieces will spread. Avoid this action This may cause a serious damage to the product. Please make sure to ventilate the room when using liquid nitrogen.
  • Page 8 Comply with laws or by the local government. regulations Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. We do not assume any responsibility for any damage due to such Avoid this modifications.

  • Page 9: Before Using

    (1) Before Using 1. Target Users Only persons who have used vacuum deposition equipment or trained based on this manual may operate this equipment. 2. Read the Manual Thoroughly Please read this manual thoroughly in order to use the equipment in a safe and correct manner.

  • Page 10: Product Overview

    (2) Product Overview 1. Purpose of This Product and Actions that are Prohibited This product is a system that evaporates substances in a vacuum space by means of resistance heating evaporation source to form a thin film. To safely and correctly use this product, avoid the following actions that are prohibited.

  • Page 11: Product Specifications

    3. Product Specifications Ultimate pressure 1.3 x 10 (Upon no-load cleaning in vacuum chamber) 6.6 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber) Evacuation time 20 minutes or less up to 4.0 x 10 (Upon no-load cleaning in vacuum chamber) 20 minutes or less up to 1.3 x 10 (Using liquid nitrogen, upon no-load cleaning in vacuum chamber)
  • Page 12 Unit Model and Specifications Quantity 3) Evaporation power 1 set Model: PSE-150C supply Dimensions: W480 mm × D435.3 mm × H149 mm Input: Single phase 200 V Output: 150 A max. Rating: 30 minutes Control method Thyristor AC phase control method Output control Constant power operation Constant current operation...

  • Page 13: Standard Accessories

    5. Standard Accessories 1) Power supply cable - For the main unit: 100 V single-phase, with plug, 2 m 1 pc. - For evaporation power: 200 V single-phase, with 1 pc. crimp-type terminal, 2 m 2) Plug adapter - Plug with grounding wire for 100-V power supply 1 pc.

  • Page 14: How To Use Switches, Handles, And Operation Levers

    6. How to Use Switches, Handles, and Operation Levers Before handling switches, handles, or operation levers, confirm the safety and conditions. Confirm Name How to Operate MAIN switch Manual ON-OFF ON: lamp illumination BACK.P(or R.P) switch Manual ON-OFF ON: lamp illumination MAIN.P(or D.

  • Page 15: Layout Of Switches, Handles, And Operation Levers

    7. Layout of Switches, Handles, and Operation Levers Evacuation system drawing Electrical system drawing...

  • Page 16: Opening The Package And Installation

    (3) Opening the Package and Installation 1. General Cautions 1) Is the product what you requested? 2) Are the accessories and all necessary parts included? 3) Maintain a space of more than 1 m from the equipment for safety upon installation. 4) After the installation position is determined, fix the Confirm equipment with the stoppers that are attached to the...

  • Page 17: Power Supply

    4. Power Supply Primary power supply Please prepare the following. Single-phase 100 V, 13.5 A or more Single-phase 200 V, 7.5 A or more Check the Warning Smaller power supply capacity may cause the breaker capacity to trip due to overcurrent during the operation. Specifications of Primary Cable Connection For Single-phase 100-V power supply, Cable length: 2 m End: 3P plug with ground...

  • Page 18: Necessary Tool List

    5. Necessary Tool List Tool Where to be Used Installation of the evaporation input Phillips head (+) screwdriver power cable Installation of the evaporation output 25-mm crescent wrench power cable Attachment of the evaporation power Torque wrench/socket (WAF 13) supply output cable Evaporation power supply cables connection diagram...

  • Page 19: Operations

    (4) Operations 1. Risks and Safety Measures upon Operations Do not apply any shock to the glass bell jar, and avoid heating it to 50°C or higher. In a case of explosion upon vacuum condition, the exploded pieces will spread. Avoid this action This may cause a serious damage to the product.

  • Page 20: Evacuation Device Operation Procedure

    2. Evacuation Device Operation Procedure 2-1 Preparation 1) Close completely by attaching BACK.P VENT(or RP. LEAK) cap (accessory). 2) Three-way valve, main valve: CLOSE 3) All switches on the operation panel: 4) Attach the probe to the gauge port for vacuum chamber when using the ionization gauge.

  • Page 21: Deposition Steps

    3. Deposition Steps 3-1 Releasing the vacuum chamber 1) When an ionization gauge is used Filament: OFF 2) Main valve: Complete close 3) Three-way valve set to FORE: Confirm 4) VENT.V(or AIR LEAK. V (of Main Valve)) when necessary : Open gradually Note When the vacuum chamber is opened, use dry air or nitrogen gas in order to prevent contamination of the vacuum chamber.

  • Page 22: Film Formation Steps

    4. Film Formation Steps 4-1 Preparation 1) Releasing vacuum chamber: Steps of 3-1 2) Attaching the evaporation source (substrate or filament) to the electrode 3) Provide the evaporation material to evaporation source 4) Shutter: CLOSE 5) Attaching the material (substrate) 6) Vacuum evacuation of vacuum chamber: Steps of 3-2 - Executing the vacuum evacuation up to a certain pressure 4-2 Film formation...

  • Page 23: Maintenance And Repair

    Work by two or Otherwise, you could injure your back. more people Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. We do not assume any responsibility for any damage Avoid this due to such modifications.

  • Page 24: Maintenance And Repair That Can Be Made By User

    2. Maintenance and Repair that Can be Made by User 1) Replacement of oil for the sealed vacuum pump and oil diffusion pump. 2) Replacement of the element of oil mist trap (sold separately) 3) O-ring replacement (except for oil sealed rotary vacuum pump) 4) Replacement of the heater of the oil diffusion pump.

  • Page 25: Oil Diffusion Pump

    3. Removal, Maintenance, and Installation of Devices 3-2 Oil diffusion pump 1) Required tools: 17 mm spanner x 1 2) Removal procedure - All devices of the coater stop.: Confirm - The primary power supply of the coater is removed.: Confirm - BACK.P VENT(or RP.LEAK): OPEN - Three-way valve: FORE (Leave the inside of the DP open air)

  • Page 26: O-Ring At Gas Bell Jar

    3. Removal, Maintenance, and Installation of Devices 3-4 O-ring at gas bell jar 1) Required tools: Not needed 2) Removal procedure - Remove the O-ring. In this case, do not cause any damage on the O-ring groove. 3) Order of attachment - Apply vacuum grease on the surface of a new O-ring.

  • Page 27: Troubleshooting

    5. Troubleshooting Symptom Cause Troubleshooting Decrease the ambient The ambient temperature at temperature to 25°C by the installation site is high. cooling. Operation time is too long Operate 24 hours to 48 after installation or long hours, and then perform termination.

  • Page 28: Storage Of Equipment

    6. Storage of Equipment Observe the following guidelines to store the equipment. 1) Place of storage - Floor with sufficient strength - Location with good ventilation - Location without direct sunlight - Location where no corrosive chemicals or gases are present. 2) Cautions before and upon storing - Perform roughing evacuation inside the vacuum chamber - Fix the vacuum coater with the stoppers that are attached to the casters.
  • Page 29 7. Consumable List Location Replacement Parts Specifications Material Quantity of Use by user Main O-ring for suction flange V-85 valve O-ring for exhaust V-34 flange O-ring for axis Connector-3614, Valve seat fixed packing No. 3 O-ring for gauge port N-16 O-ring for leakage valve O-ring for leakage valve Gasket for suction...

  • Page 30: Disposal

    2) Disposal: Assigned to collector and carriers of industrial waste. (7) Optional Parts Do not make any modification of the product that is not permitted by Ulvac Kiko, Inc. We do not assume any responsibility for Avoid this Caution any damage due to such modifications.
  • Page 31 1. Standard Optional Parts List Installation Name of optional parts Applications conditions Standard electrode set Installable by Evaporation electrode. (for service port) user Installable by Gauge port set For adding Ø 18 gauge port. user Installable by Hermetic port set For adding Hermetic seal port.
  • Page 32 1. Standard Optional Parts List Installation Name of optional parts Applications conditions Preventing evaporated material Installable by Plate preventing adhesion from adhering to glass bell jar. user Plate for separating evaporation Electrode separation plate Installable by source (2-point type) user Contamination prevention.

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