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Ulvac VTR-060M/ERH User Manual

Small vacuum deposition system
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No.35020-2-02-3
User Manual
Small Vacuum Deposition System
ＶＴＲ－０６０Ｍ／ＥＲＨ
Please read the following before using this product.
Keep this manual in a safe place ready for use.
The content of this manual is liable to change without prior notice due to
changes in product specifications, product improvements and revisions.
ULVAC KIKO, Inc.

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Summary of Contents for Ulvac VTR-060M/ERH

  • Page 1 Please read the following before using this product. Keep this manual in a safe place ready for use. The content of this manual is liable to change without prior notice due to changes in product specifications, product improvements and revisions. ULVAC KIKO, Inc.

  • Page 2: Table Of Contents

    Table of Contents indicates a page with safety-related content. For safe use of this product （１）Introduction------------------------------------------------------------------------------- １ １．Users--------------------------------------------------------------------------------- １ ２．Reading and Understanding the Manual --------------------------------------- １ ３．Storing the User Manual---------------------------------------------------------- １ ４．Warranty ---------------------------------------------------------------------------- １ ５．Legal Compliance ----------------------------------------------------------------- １ ６．Safety During Repairs ------------------------------------------------------------ １ （２）Product Outline -------------------------------------------------------------------------- ２...
  • Page 3 ３．Operation Procedure (Option) --------------------------------------------------- １３ ３－１ Preparation ---------------------------------------------------------------- １３ ３－２ Operation ------------------------------------------------------------------ １３ ３－３ Stopping ------------------------------------------------------------------- １４ ３－４ Open Vacuum Tank ------------------------------------------------------ １４ ３－５ Evacuate Vacuum Tank ------------------------------------------------- １４ ３－６ Preparation for Deposition ---------------------------------------------- １４ ３－７ Deposition ----------------------------------------------------------------- １５ ４．Handling Malfunctions ----------------------------------------------------------- １５ ４－１...

  • Page 4: For Safe Use Of This Product

    Ulvac Kiko,Inc. holds the copyright for this manual and the safety guide. Reproduction of all or part of this manual without the permission of Ulvac Kiko, Inc. is prohibited. Read the section “For safe use of the product” thoroughly before using the equipment. The precautions noted here are provided to ensure that the product is used safely, and to avoid danger and injury to users and other personnel.
  • Page 5 Warning Labels A warning label is affixed at the following location. 1) Left back of the rack. (PL018) 2) Right front of the rack．(PL019)(PL020) Check labels Contact the manufacturer if the labels become dirty and difficult to read, or Caution if they are peeling off.
  • Page 6 Environment This equipment is not explosion-proof, and therefore cannot be used in environments where there is a danger of explosion. Use in such environments may result in ignition and explosion causing a Prohibited fire and burn injury. The sealed rotary vacuum pump becomes hot during operation. Therefore, do not touch the pump with your hands during Warning operation or for 30 minutes after stopping operation.
  • Page 7 Operation Do not expose the glass chamber to shock or heat that is 50°C or higher. Broken pieces or shards may shoot out if the inside is damaged when a vacuum is created. Prohibited Warning This can cause equipment damage. Do not apply sudden gas loads (e.g.
  • Page 8 Maintenance, Repair and Disposal Put on a dust mask and gloves when cleaning the thin film that builds up and adheres to the inside of the vacuum tank. The thin film turns into fine particles dispersing into the air and can enter Protective your body through inhalation.

  • Page 9: １．Users

    (1) Introduction 1. Users This equipment is to be operated by personnel with experience using vacuum deposition systems, or by personnel that have received training that is based on this manual. 2. Reading and Understanding the Manual Read the manual thoroughly before use, and ensure that the equipment is used correctly. It is particularly important to read the section entitled “For safe use of this product.”...

  • Page 10: ２）Product Outline

    (2) Product Outline 1. Purpose of Use and Prohibited Items This equipment is a vacuum deposition system that creates and deposits a thin film by evaporating substances from a vapor source using resistance heating evaporation in a vacuum. Observe the prohibited items below to ensure that the equipment is used correctly. Using this equipment only as vacuum chamber.

  • Page 11: ３．Product Specification

    3. Product Specification Pa unit Ultimate pressure (When there is no load and it is clean inside the vacuum) Option specification ：1.5 × 10 Exhaust time Under 20 minutes and up to 4.0 × 10 (When there is no load and it is clean inside the vacuum) Power requirements (Unit) 100 V, single phase, 0.6 kVA...

  • Page 12: ５．Standard Accessories

    Component Model and specifications Qty. • Model: TG70F 4) Turbomolecular pump • Exhaust flow rate: 60 L/sec. (TMP) • Ultimate pressure: 5 × 10 • Exhaust outlet: ISO-R63, KF16 • Controller model: TC76 • Power requirements: 160 VA • Model: G-20DA 5) Sealed rotary vacuum •...

  • Page 13: ６．Using Switches, Handles And Operation Levers

    6. Using Switches, Handles and Operation Levers Check the safety and status of the switches, handles and operation levers before operating the equipment. Check Name Operation BACK.P switch Manual ON/OFF ON: Lamp lights up VENT.V Straight type Needle and value Open: Handle is vertical Close: Handle is horizontal TMP controller...

  • Page 14: ７．Layout Of Switches, Handles And Operation Levers

    7. Layout of Switches, Handles and Operation Levers Standard specification Exhaust system diagram Electrical system diagram ６...
  • Page 15 Option specification Exhaust system diagram Electrical system diagram ７...

  • Page 16: ３）Opening The Packaging And Installation

    (3) Opening the Packaging and Installation 1. General Precautions 1) Verify that the contents match the product that was ordered. 2) Verify that the specified accessories are included. 3) Clear a space at least 1 m around the equipment to ensure safety during installation.

  • Page 17: ４．Power Supply

    4. Power Supply Primary power supply capacity Prepare a single phase 100 V power supply with a minimum of 6.0 A and a single phase 100 V power supply with a minimum of 8.0 A. Warning Check capacity When the capacity of the power supply is insufficient, breakers may trip if there is an overcurrent during operation.

  • Page 18: Wiring Diagram Of Evaporation Power Supply Output

    Wiring Diagram of Evaporation Power Supply Output Standard specification - One point type Option specification - Two point type Option specification - Three point type １０...

  • Page 19: ５．List Of Required Tools

    5. List of Required Tools Tool Application For connecting the evaporation power Phillips screwdriver supply input cable Torque wrench/socket For connecting the evaporation power (Width across flats: 13) supply cable For connecting the evaporation power Spanner (Width across flats: 13) supply cable (4) Operation 1.

  • Page 20: ２．Operation Procedure (Standard)

    2. Operation Procedure (Standard) 2-1 Preparation 1) Front panel switch: 2) Primary power cable: Connect 3) Turbomolecular pump VENT.V: Close 4) Vapor source for electrodes (boat and filament, etc.): Install 5) Supply source material to vapor source 6) Shutter: Close 7) Chamber: Close 8) Mount substrate onto top lid holder...

  • Page 21: ３．Operation Procedure (Option)

    2-4 Stopping Stopping equipment 1) Evaporation power supply MAIN after deposition: OFF (Check) 2) TMP controller [STOP/RESET]: Press (TMP free run) • Controller: NORMAL turns off The TMP begins to slow down and stop in free run (no brake operation). It takes approximately 25 minutes for the TMP to stop completely.

  • Page 22: ３－４ Open Vacuum Tank

    3-3 Stopping Stopping equipment 1) Evaporation power supply MAIN after deposition: OFF (Check) 2) Evacuate to maintain vacuum in vacuum tank Vacuum gauge filament: OFF (In the case of SH-2 alone mode) 4) 3 way valve: FORE (Check) 5) Main valve: CLOSE 6) TMP controller [STOP/RESET]: Press (TMP free run)

  • Page 23: ４．Handling Malfunctions

    3-7 Deposition 1) Evaporation power supply MAIN: 2) SELECT: ON (Select conducting electrodes) 3) HIGH (Lamp lights up): Check 4) MANUAL (Lamp turns off): Check 5) POWER (Lamp lights up): 6) Press the UP ▲ key so the current gradually passes to the vapor source. 7) Monitor the red heat of the vapor source.

  • Page 24: ５）Maintenance And Repairs

    (5) Maintenance and Repairs 1. Hazards During Maintenance and Repairs, and Associated Safety Measures Put on a dust mask and gloves when cleaning the thin film that builds up and adheres to the inside of the vacuum tank. Protective The thin film turns into fine particles dispersing into the air clothing and can enter your body through inhalation.

  • Page 25: ３．Removing, Maintaining And Fitting The Device

    3. Removing, Maintaining and Fitting the Device 3-1 Sealed Rotary Vacuum Pump 1) Tools required: Spanner (Width across flats: 8 mm) × 1 and Phillips screwdriver 2) Removal • Ensure that all devices on the equipment are stopped. • Ensure that all primary power supplies for the equipment are disconnected. •...

  • Page 26: ３－２ Turbomolecular Pump

    3. Removing, Maintaining and Fitting the Device 3-2 Turbomolecular Pump 1) Tools required: Spanner (Width across flats: 13 mm) 2) Removal • Ensure that all devices on the equipment are stopped. • Ensure that all primary power supplies for the equipment are disconnected. •...

  • Page 27: ３－４ Replace Base Plate And Top Lid O-Ring

    3. Removing, Maintaining and Fitting the Device 3-3 Oil Mist Trap OMT-050A 1) Tools required: Phillips screwdriver (Used for replacing element.) 2) Removal • Use both hands to turn the base of the oil mist trap unit counterclockwise. 3) Replace element Refer to the OMT-050A Mist Trap User Manual (provided separately).

  • Page 28: ４．Maintenance And Inspection Locations

    4. Maintenance and Inspection Locations Inspection locations Maintenance and inspection details Timing (device name) Glass chamber Clean the inside. When necessary Sealed rotary Ensure that the oil level on the oil level gauge is Each time before vacuum pump within the indicated line. Change oil.
  • Page 29 5. Troubleshooting Symptoms Cause Solution Ultimate pressure is poor High ambient temperature in area Use air conditioning to reduce of installation. ambient temperature to 25ºC or Ultimate pressure is unstable lower. Short operation time following Weak exhaust performance Run for 24 – 48 hours and check installation or long-term stoppage again.
  • Page 30 6. Storing the Equipment Refer to the following instructions when storing the equipment for a long period of time. 1) Storage location • Floor with sufficient strength. • Good ventilation. • Protected from direct sunlight. • Protect from effects of corrosion due to chemicals and gases etc. 2) Steps to be taken prior to, and during storage •...
  • Page 31 Option specification Replaceable Location Name Specification Material Qty. by customer O-ring for KF16 entry ○ Ｐ３２ ＦＰＭ １ Vacuum tank port ○ ＫＦ１６ ＦＰＭ １ Center ring O-ring O-ring for intake ○ Ｖ４０ ＦＰＭ １ Main valve flange ○ Ｎ７ ＦＰＭ...

  • Page 32: １．Precautions To Be Taken For Disposal

    (6) Disposal 1. Precautions to be taken for Disposal The owner and/or operator are legally obliged to dispose of the equipment and pump, etc., as industrial waste. Please dispose according to the rules or regulations Caution Legal compliance established under law and by the local governing body. Applicable laws: Laws related to the handling and cleanup of waste products.
  • Page 33 1. Standard Optional Components Optional components Application Fitting Can be fitted by Sample holder A (ø200) Secures sample (without drilling) customer Can be fitted by Sample holder B (ø200) Secures sample (M4 tapping) customer Helps prevent the adhering of the vapor Can be fitted by Deposition-preventing plate onto the glass chamber.

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