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SEM Hitachi S-4700 user manual
1. Warnings and recommendations
Be sure to read the following remarks:
1.1. This equipment belongs to VAN Partners. Let's handle it with much care,
1.2. Before exchanging the sample, always check that the stage is in its initial position:
X = Y = 12.5mm, Z = 12mm, Tilt = 0˚, θ = 0˚
1.3. This is a simplified manual. It is recommended to read and study the original manual.
2. Terms
2.1. RP = Rotary Pump,
2.2. IP = Ion Pump,
2.3. DP = oil Diffusion Pump,
2.4. S.C. = Specimen Chamber = main chamber,
2.5. S.E.C. = Specimen Exchange Chamber = Load lock chamber.
3. Regular State
Always ON. RP and DP maintain vacuum in the main chamber and IP maintain vacuum in the column.
4. Points to check before starting
If there is an abnormality, contact the person in charge.
On the front panel (below the S.C.), check from left to right:
4.1. EVAC POWER
4.1.1. Switch is ON,
4.1.2. DP/TMP, WATER and AIR PRES switched ON (green lamps ON)
4.2. OBJ. APT. → position HEAT
4.3. ION PUMP VACUUM
4.3.1. Lamps IP1, IP2, and IP3 lighted ON,
4.3.2. Check the IPs vacuum values by rotating the knob. The following should be satisfied:
IP1<2e-7Pa, IP2<2e-6Pa, IP3<7e-5Pa. Fill out the log with the values.
4.4. CHAMBER VACUUM → S.C and S.E.C vacuum are HIGH (green lamps)
4.5. VALVE → GUN switch in position CLOSE. If not, set it to CLOSE
4.6. CHAMBER → switch on S.E.C. (should be protected with a tape)
4.7. If you want to use the cold trap, check that there is more than 1.3L of liquid nitrogen in the Dewar Vessel. If
this is not the case, fetch some nitrogen in CR2.
5. Preparation
5.1. Turn PC on
5.1.1. DISPLAY switch ON (under the PC desk, behind the door),
5.1.2. Windows 95 will startup.
5.1.3. Press CTRL+ALT+DEL.
5.1.4. Launch PC-SEM.exe. There is no password, just click OK,
5.1.5. When the soft start, a dialog showing the X and Y values of the stage appears. Check the real values of X
and Y, enter those values in the box and then click OK,
5.2. Filling liquid nitrogen
If you want to use the cold trap, fill it with 1.3L of liquid nitrogen.
5.3. Set the sample
5.3.1. Select a suitable sample holder,
Please, leave this manual here. You can find an electronic version in the TakedaCR Wiki:
http://takeda-cr.t.u-tokyo.ac.jp
English Version by Eric, VDEC, Mita Lab, 2015/01/27
(accessible only from inside Utokyo)
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Summary of Contents for Hitachi SEM S-4700
- Page 1 SEM Hitachi S-4700 user manual English Version by Eric, VDEC, Mita Lab, 2015/01/27 Please, leave this manual here. You can find an electronic version in the TakedaCR Wiki: http://takeda-cr.t.u-tokyo.ac.jp (accessible only from inside Utokyo) 1. Warnings and recommendations Be sure to read the following remarks: 1.1.
- Page 2 5.3.2. Fix tightly the sample on the sample holder with the double-sided conductive tape (don't use too much tape). If the sample drops into the chamber, the chamber will have to be disassembled, 5.3.3. Fix the height of the sample with the lock screw. The highest part of the sample should not exceed the level gauge by 0.5mm or it could damage the lens inside the main chamber.
- Page 3 7.3.2. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to make the displacement as small as possible. 7.3.3. Click "Stigma Alignment Y" and repeat the same operation. 7.3.4. Click "OFF" 7.4. Low Mag Position 7.4.1. In the mode "High Mag", set the lower magnification, and set a landmark on the sample in the center of the screen.
- Page 4 9.3.7. Wait for atmospheric pressure and pull the door open by grabbing the door itself, not the rod. 9.3.8. Push a little the rod and unscrew the specimen holder from the tip of the rod. 9.3.9. Pull the rod back into the locked position and close the door. 9.3.10.