Oerlikon TURBOVAC 361 Manuals

Manuals and User Guides for Oerlikon TURBOVAC 361. We have 1 Oerlikon TURBOVAC 361 manual available for free PDF download: Operating Instructions Manual

Oerlikon TURBOVAC 361 Operating Instructions Manual

Oerlikon TURBOVAC 361 Operating Instructions Manual (36 pages)

Turbomolecular pumps with grease-lubricated bearings

Brand: Oerlikon | Category: Water Pump | Size: 0.45 MB

Table of Contents

Table of Contents
2
Important Safety Information
3
1 Description

6
- Design and Operation
  6
- Supplied Equipment
  6
- Technical Data
  7
- Ordering Information
  12
- Operating Environment and Cooling
  13
2 Transport and Storing

14
3 Installation

15
4 Operation

24
- Media Compatibility / Purge Gases
  24
- Start-Up
  25
- Bakeout
  26
- Operation
  26
- Switching off
  26
- Venting
  27
5 Maintenance

29
- Maintenance Intervals
  29
- Oerlikon Leybold Vacuum Service
  29
- Cleaning
  30
- Removing the Pump from the System
  30
6 Troubleshooting

31
7 Waste Disposal

33
- EC Manufacturer's Declaration
  34

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