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TURBOVAC 600 C
Oerlikon TURBOVAC 600 C Manuals
Manuals and User Guides for Oerlikon TURBOVAC 600 C. We have
1
Oerlikon TURBOVAC 600 C manual available for free PDF download: Operating Instructions Manual
Oerlikon TURBOVAC 600 C Operating Instructions Manual (36 pages)
Turbomolecular pumps with grease-lubricated bearings
Brand:
Oerlikon
| Category:
Water Pump
| Size: 0.45 MB
Table of Contents
Table of Contents
2
Important Safety Information
3
1 Description
6
Design and Operation
6
Supplied Equipment
6
Technical Data
7
Ordering Information
12
Operating Environment and Cooling
13
2 Transport and Storing
14
3 Installation
15
Conforming Utilisation
15
Ambient Conditions
15
Connecting the Pump to the Vacuum Chamber
16
Forevacuum Connection
20
Connecting the Cooling
20
Connecting the Purge Gas and Airing Device
22
Connecting the TURBOTRONIK
23
4 Operation
24
Media Compatibility / Purge Gases
24
Start-Up
25
Bakeout
26
Operation
26
Switching off
26
Venting
27
5 Maintenance
29
Maintenance Intervals
29
Oerlikon Leybold Vacuum Service
29
Cleaning
30
Removing the Pump from the System
30
6 Troubleshooting
31
7 Waste Disposal
33
EC Manufacturer's Declaration
34
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