1. Description
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1-2 Structure ······························································································· 1-2
···································································································· 2-1
2-1 Run Preparation ······················································································ 2-2
2-1-2 ROTOR ························································································ 2-3
2-2 Basic Operation ······················································································ 2-4
2-4
2-5
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2-6
······························································································· 3-1
3-1 Rotor Chamber ······················································································· 3-2
3-3 Cabinet ································································································· 3-2
3-4 Rotor ···································································································· 3-3
3-5 Replacement Parts ·················································································· 3-3
3-6 Others ·································································································· 3-3
Table of Contents
··················································································· 1-2
··············································································· 1-5
·················································································· 1-5
······································································ 2-4
······································································· 2-9
····································································· 2-16
········································································ 2-30
································································ 2-32
······························································· 2-37
························································· 2-40
··················································································· 2-44
····································································· 2-48
·················································································· 2-50
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·························································· 2-55
v
··············································· 2-12
·································· 2-13
····· 2-49