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Ulvac EGL-206M Instruction Manual

Multi-hearth electron beam soures
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EB0007-03e
INSTRUCTION MANUAL
MULTI‐HEARTH ELECTRON BEAM SOURCS
model：EGL-206M/EGL-406M
nd
4
edition 2023/08/01
ULVAC, Inc.
※ Read this manual before operation this product
Keep this manual at your hand for immediate reference.

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  • Page 1 EB0007-03e INSTRUCTION MANUAL MULTI‐HEARTH ELECTRON BEAM SOURCS model：EGL-206M/EGL-406M edition 2023/08/01 ULVAC, Inc. ※ Read this manual before operation this product Keep this manual at your hand for immediate reference.
  • Page 2 EB0007-03e...
  • Page 3 EB0007-03e...
  • Page 4 The contents of this manual are subject to change without notice for improvement. If you come up with any question or trouble, contact your local ULVAC representative or ULVAC,Inc.. Always use the electron beam source safely and take care of it correctly.
  • Page 5 EB0007-03e Safety Cautions Most accidents are attributed to careless operation, inspection, maintenance or repair. Also failure to comply with safety cautions or predict potential danger is responsible for accidents. Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
  • Page 6 EB0007-03e Safety Denotations Safety denotations are used throughout this manual and labeled on the equipment to call operator s attention to safety. Safety denotations are classified as follows. Failure to comply with this involves the possibility of DANGER impending death or serious personal injury. WARNING Failure to comply with this involves the possibility of death or serious personal injury.
  • Page 7 If the trouble is evidently imputable to defects in material or workmanship, ULVAC will correct it free of charge. However, troubles caused by misuse or abuse of the equipment, negligence of operating instructions, or modification or by force majeure are not covered by this warranty.
  • Page 8 EB0007-03e • Repair period In case of trouble, every effort will be made to correct it at the earliest possible date, but it may take time to repair it if the unit is installed in a remote place or is severely damaged.

  • Page 9: Table Of Contents

    EB0007-03e Table of Contents Page FOR DISPOSAL ..........................8 GENERAL ........................... 1 Features of EGL-206M/EGL-406M ..................1 Specifications ........................2 UNPACKING AND RECEIVING CHECK ................4 Care to be taken in Unpacking ..................... 4 Check after Unpacking ......................4 Standard Spare Parts List ..................... 5 MOUNTING THE ELECTRON BEAM GUN ................

  • Page 11: General

    SECTION 1 GENERAL The electron beam evaporation source EGL-206M/EGL-406M provides higher performance and reliability based on ULVAC's years of accumulation of technologies and actual achievement. EGL-206M/EGL-406M has six crucibles with a capacity of 20cm (a maximum power supply of 8kW) and EGN-406M...

  • Page 12: Specifications

    0 A ～ ±1.2A MAX± 12V DC) Y-axis scan coil (at 20 C) 0V ～ 12V AC MAX 50A Filament Crucible: Quantity EGL-206M ： 20cm ３ Capacity EGL-406M ： 40cm ３ 20 cm ３ Crucible ： 42φ 32φ 19 H...
  • Page 13 SECTION 1 Fig. 1.1 Dimensional Drawing for EGL-206M/EGL-406M...

  • Page 14: Unpacking And Receiving Check

    SECTION 2 UNPACKING AND RECEIVING CHECK Care to be taken in Unpacking Carefully unpack the case containing the electron beam gun. Prepare a clean room for inspecting the electron beam gun. CAUTION 1. Handle the EB gun more carefully not to drop it. 2.

  • Page 15: Standard Spare Parts List

    SECTION 2 Standard Spare Parts List Table 2.1 Q’ty Item Specifications Part number Tungsten, D=3.2 mm, L=14.5 mm Filament 210004027700 Insulator D=12 mm, L=22 mm 210004028100 Insulation bushing OD=8 mm, ID=4 mm, L=3.5mm 210004028200 Fixed insulator OD=5 , ID=4 mm, L=6.5mm 210004028300 M4 6 Filament setscrew...

  • Page 16: Mounting The Electron Beam Gun

    SECTION 3 MOUNTING THE ELECTRON BEAM GUN Necessary Equipment (1) Power supply unit for electron beam gun ULVAC HPS series electron beam gun power supply unit, such as HPS-1000F, HPS-1600F, etc. (2) Pumping unit for deposition 1 set (3) Gun base (SUS 304) for the above...
  • Page 17 (15) Cooling water equipment The Model EGL-206M/EGL-406M requires a water flow rate of 10 L/min or more. Water pressure requirement is 3 to 3.5 kg/cm or more, which slightly varies with piping arrangement and length.

  • Page 18: For Disposal

    (1) Gun base Use a SUS304 stainless steel gun base. CAUTION Weight of EGL-206M /EGL-406M is 18kg, so the gun base needs enough strength to bear the weight. Special attention is needed in case of making notches or holes. If the exhaust port is located under the gun base, make a notch or a hole in the gun base so that the pumping efficiency is not lowered.
  • Page 19 1 Gauss or less. CAUTION If a hearth of EGL-206M/EGL-406M is operated by a motor drive, take care so that hand is not caught in the device. (3) Installing multiple EG guns (See Fig. 3.1.) Magnetic interference will occur if two or more EB guns are installed in proximity to each other.
  • Page 20 SECTION 3 in diameter if it exceeds 20 cm. If the cable length is greater than this, connect a solderless terminal to the end of the cable by welding (do not solder). If the cable end is connected by compression alone, the connection will become loose due to heat cycle and trouble may result.
  • Page 21 CAUTION 1. The flow switch recommended by ULVAC uses a magnetic float, which may be deposited with iron powder. Periodically disassemble and clean 2. The pressure switch has been so set that it is turned ON at 3 kg/cm OFF at 2.5 kg/cm...
  • Page 22 SECTION 3 (9) Wiring of flow switch Connect the flow switch contacts to the GUN WATER interlock circuit of the electron beam gun power supply. CAUTION If there is a heat source (for example, resistance evaporation source) near the EB gun, provide an interlock such that the heat source is not activated unless cooling water is fed to the hearth and coil.

  • Page 23: Safeguards Against X-Rays (See Fig. 3-5.)

    X-rays may leak defending on the thickness of the gasket. X-rays can be harmful to the human body if exposed for a long time. For safety, ULVAC recommends the following methods.
  • Page 24 SECTION 3 Fig.3-1 Installation of two or more electron beam guns...
  • Page 25 SECTION 3 ION BEAM ELECTRON GUN SHIELD BEAM PLASMA SPUTTERING EVAPORATION FILAMENT HIGH VOLTAGE LEADS MATERIAL Fig. 3-3. The sputtering mechanism for EB gun ELECTRON BEAM GUN GUN SHILED PUMP OUT AREA (100ｃ㎡ MINIMUM) H>=15mm HIGH VOLTAGE LEADS Fig. 3-2 Sputtering mechanism and gun shield...
  • Page 26 SECTION 3 Fig. 3-3 Typical water cooling piping arrangement...
  • Page 27 SECTION 3 Fig. 3-4 Wiring arrangement in vacuum chamber...
  • Page 28 SECTION 3 VIEW PORT LEADEN GLASS BELLJAR TARGET X RAY GASKET SUS304(SHIELD) Fig. 3-5 X-ray shield...

  • Page 29: Operation

    SECTION 4 OPERATION Check before Operation Be sure to check the following before putting power to work. Make sure that the electron beam gun power supply is switched OFF. (2) Check the wiring of the deflection coils. Is the connection correct? ・...
  • Page 30 SECTION 4 (5) Checking the flow switch Does the water flow rate meet the requirements of the electron ・ beam gun? Is the flow switch adjusted in such a way that switch contact is ・ switched OFF when the minimum rate of water specified for the electron beam gun flows? Is the flow switch connected to the electron beam gun power ・...

  • Page 31: Operation Of Electron Beam Gun

    SECTION 4 Operation of Electron Beam Gun Read the power supply for the electron beam gun instruction manual in conjunction. (1) Charge the crucible with evaporant. If the evaporant is a metal, it is desirable to use a high purity material that has been degassed in vacuum.
  • Page 32 The ULVAC electron beam gun power supply is so designed that it automatically lowers the high voltage if an overcurrent is produced due to discharge, and the high voltage is restored after the discharge has ceased. If the discharge does not stop, the possible cause is inside the vacuum chamber.
  • Page 33 SECTION 4 (6) When the abnormal discharge has stopped, increase the emission current slowly. The filament will light. Set the emission current to 50 mA. The beam spot will be seen in the hearth. Position the beam spot in the center of the crucible.

  • Page 34: Disassembly And Reassembly Of Electron Beam Gun

    SECTION 5 DISASSEMBLY AND REASSEMBLY OF ELECTRON BEAM GUN In disassembling or reassembling the electron beam gun, be sure to wear clean gloves. Turn OFF the MAIN switch on the electron beam gun power supply. Remove the key and keep it yourself. Changing Filament (1) Dismounting the emitter assembly Remove the screw that clamps the filament cable to the terminal.
  • Page 35 SECTION 5 (4) Mounting the emitter assembly After checking the filament for correct mounting, and filament holders for absence of foreign matter in between them, insert the emitter assembly to the unit and fasten the two setscrews securely. Finally, connect the filament cable. NOTE 1.
  • Page 36 SECTION 5 Care to be taken in disassembling the EB Gun (1) Before removing the hearth and hearth deck, be sure to drain the water remaining in the hearth with air. If this is not done, water will overflow and may cause a serious trouble. (2) Remove the filament lead, magnet coil wiring, etc.
  • Page 37 SECTION 5 (7) Apply vacuum grease to the new O-ring and mount it onto the hearth shaft. CAUTION At this time, make sure that the O-ring is free from foreign matter like flint, hair or the like. Foreign matter can cause leak. (8) Insert the hearth into the hearth shaft straight from above.
  • Page 38 SECTION 5 Fig.5.1 Exploded view of emitter assembly and dimensional drawing for electrode...

  • Page 39: Parts List

    SECTION 5 Parts List EGL-206M/EGL-406M ( 1/3 ) Part No. Description Q’ty EGL-206M/EGL-406M One set of E/B gun Shield SUS304 200001660700 Hearth deck 210004014000 O-ring Viton JIS B2401 P9 C10000000417 Vacuum joint (1) 200001615100 Trimming piece 200001660900 Holder SUS304 200001661000...
  • Page 40 SECTION 5 EGL-206M/EGL-406M ( 2/3 ) Part No. Description Q’ty Separator SUS304 200001663800 Support SUS304 200001663900 Base plate SUS304 200001664000 Limit switch mount SUS304 200008869300 Limit switch base SUS304 200008869400 Limit switch cover SUS304 200008869500 Bevel gear (2) 210004030400 Snap ring for hole...
  • Page 41 SECTION 5 EGL-206M/EGL-406M ( 3/3 ) Description Q’ty Part No. Insulation bush Alumina 210004028200 Filament holder (right) 210004024600 Filament holder (left) 210004024700 Filament 210004027700 Filament support 210004024300 Filament setscrew SUS304 M4 6 Au plating 210004024000 Filament terminal ( right ) Mo...
  • Page 42 SECTION 5 Fig. 5-2 Exploded view of EGL-206M/EGL-406M...
  • Page 43 SECTION 5 Fig. 5-3 Exploded view of emitter assembly Fig. 5-4 Exploded view of Limit switch assembly...

  • Page 44: Maintenance

    Take care not to burn yourself. 2. If a hearth of EGL-206M/EGL-406M is operated by a motor drive, take care so that hand is not caught in the device.

  • Page 45: Preventive Maintenance

    SECTION 6 Preventive Maintenance Turn OFF the three-phase input power of the EB power supply before making ｔhe following checks, except for items 1 through 3. Table 6.1 Frequency of check Checks Remarks Daily Weekly Monthly 1 Does the electron beam gun flow switch turn ON and OFF at the specified flow rate? Here, does Note 1.
  • Page 46 SECTION 6 Frequency of check Checks Remarks Daily Weekly Monthly 9 Is the surface of the high voltage feed-through (high voltage electrode) insulator contaminated? 10 Is the connection between the high voltage cable and high voltage feed-through secure? Check if screws are oxidized with heat and Note 5.

  • Page 47: Scheduled Inspection

    SECTION 6 Scheduled Inspection Check the following after turning OFF the 3-phase power. Table 6.2 Frequency of check Checks When Every Every Remarks installed 3 months year 1 Is the feed-through ground terminal grounded with a ground resistance of not more than 10 ? Is the ground Note 7.
  • Page 48 SECTION 6 NOTES 1. Make functional check of the flow switch in the following way before starting the coater. Close the cooling water valve temporarily to check that the GUN WATER indicator goes out. Then slowly open the valve to feed water and check that the indicator lights when the flow rate exceeds the necessary minimum value mentioned in the electron beam gun instruction manual.
  • Page 49 SECTION 6 the inside wall of the crucible water path, not only deteriorating heat conductance and lowering the cooling effect, but also melting the crucible locally and perforating it. 9. The multi-hearth type electron beam gun uses an O-ring for the shaft seal to seal water and vacuum.

  • Page 50: Troubleshooting Guide

    Troubleshooting Guide Trouble symptoms described in the manual are limited to those that have been experienced by ULVAC and that can possibly happen. If a trouble occurs simultaneously with that of the electron beam gun power supply, the symptom may differ from that described here. In that event, also refer to the troubleshooting guide for the E/B power supply.

  • Page 51: Troubleshooting

    SECTION 7 7. TROUBLESHOOTING Trouble symptom Possible cause Corrective action 1. The filament does not light. A. Filament burnout a. Change the filament. The high voltage is normal. B. Poor contact or broken wire of the a. Check the filaments set-screws for tightness. filament cable.
  • Page 52 SECTION 7 Trouble symptom Possible cause Corrective action B. Short-circuit of the high voltage a. Check if the filament line is shorted to ground. lines to ground. b. Check if particles of evaporant are caught on the high voltage feed-through terminals. c.
  • Page 53 SECTION 7 Trouble symptom Possible cause Corrective action 9. Evaporant adheres to the A. Insufficient cooling of the hearth a. Check the water flow rate, which must be 10 /min or more. hearth. Or the hearth is b. Check the water temperature, which must be 25 C or lower. gouged on the filament side.
  • Page 54 SECTION 7 Trouble symptom Possible cause Corrective action D. Poor contact of the filament cable a. Check terminals to see if they are tight. If loose, retighten or filament lead. them. E. The hearth is contaminated. a. Clean the hearth. Or evaporant is not sufficiently b.
  • Page 55 SECTION 7 Trouble symptom Possible cause Corrective action 18. The emission current is A. Poor contact of the filament cable a. Check if the filament setscrew is tight. saturated and cannot be or filament lead. b. Check if the filament support is clean. increased.

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Egl-406m

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